Pulsed
Laser Deposition PLD of thin films using
excimer laser LPX 305i and five deposition chambers |
![PLD lab](../fotos/fotos_klein/PLD_lab_6%25_DSC00759.jpg) |
PLD-G-chamber up to 4-inch substrate
diameter, multi-target equipment
|
![G-Kammer](../fotos/fotos_klein/G_Kammer_6%25_Dsc00115_gedreht.jpg) |
PLD-M-chamber with
heater for 15x15 mm² substrates, multi-target equipment,
RF-radical source
|
![M-Kammer](../fotos/fotos_klein/M_Kammer_6%25_DSC00709.jpg) |
PLD-S-chamber
with 4-inch diam. heater, multi-target equipment
|
![S_Kammer](../fotos/fotos_klein/S_Kammer_6%25_DSC00215.jpg) |
PLD-E-chamber with multi-target equipment,
3-inch diam. heater, in-situ spektroscopic ellipsometry. |
![E-Kammer](../fotos/fotos_klein/E_Kammer_6%25_DSC00595.jpg) |
PLD-Q-chamber
for gas pressure in mbar-range, for nano-heterostructures
|
![Q_kammer](../fotos/fotos_klein/Q_Kammer_6%25_DSC00770_beschn.jpg) |
DC-sputtering chamber for Au, Pt, Ti, Cr, Ag,... |
![Sputter](../fotos/fotos_klein/Sputterkammer_10%25_Bild47.jpg) |
Surface
analysis of structure and
morphology by electron diffraction RHEED |
![RHEED](../fotos/fotos_klein/RHEED_6%25_DSC00225.jpg) |
Secondary
neutrals mass spectrometry SNMS Leybold
INA 3 for chemical analysis and depth profiling
|
![SNMS INA3](../fotos/fotos_klein/SNMS_6%25_DSC00804.jpg) |
Surface
profiler DEKTAK 3030
|
![Dektak](../fotos/fotos_klein/Dektak_6%25_DSC00806.jpg) |
Scan of critical current density of
double-sided high-Tc superconducting thin films up to 71 x 75 mm² area
|
![jc scan](../fotos/fotos_klein/jc_scan_6%25_DSC00639.jpg) |
RCL-measurement with control of sample
temperature from -35 up to
+85°C |
![RCL](../fotos/fotos_klein/RCL_6%25_DSC00230.jpg) |
Scanning Tunneling
Microscope STM
"Beetle STM"
|
![STM](../fotos/fotos_klein/STM_15%25_vidcap_office314_stm.jpg) |
Sintering
furnace up to
1200°C (chamber) and 1800°C (tube),
ball mills,
press moulds for PLD target preparation, in tube furnace also thermal
growth of ZnO-nanostructures.
|
![Rohrofen](../fotos/fotos_klein/Rohrofen_5%25_Dsc00554_dreh.jpg) |
Microwave vector network analyser Anritsu-Wiltron 37347A up to 20 GHz.
|
![Networkanalyzer](../fotos/fotos_klein/Resonator_MW_10%25_Bild03.jpg) |
Zeiss optical
microscope Axiolab with
CCD-camera
|
![Mikroskop](../fotos/fotos_klein/Zeiss_Mikropskop_10%25_Bild04.jpg) |