X-Ray Diffraction Measurements and Depth Profiling by Secondary Neutral Mass Spectrometry on Epitaxially Grown High-Tc Superconducting Thin Films* | Division of Superconductivity and Magnetism, University of Leipzig

Mikrochim. Acta 125, 211 (1997)

H. C. Semmelhack, H. Börner, and M. Lorenz

Abstract

YBa₂Cu₃O_7-delta thin films were deposited by pulsed laser deposition (PLD) on various substrates with different misfit. X-ray diffraction (XRD) measurements were performed in order to characterize the growth quality of the films and to study the orientation between the films and the substrates. On the used substrates all investigated films are relaxed independently, and epitaxially grown who show a long range ordered two domain structure. The elemental concentration depth profiles of these films detected by secondary neutral mass spectrometry (SNMS) show homogeneous stoichiometric element distributions with slight deviation of the Y content.